All refereed and accepted papers presented at the Conference will be published as a special volume of VACUUM – Surface Engineering, Surface Instrumentation & Vacuum Technology journal. We kindly request the authors to prepare manuscripts using the Manuscript Preparation Guide presented below . Invited papers must not exceed 6 journal pages. Contributed (oral and poster) papers must not exceed 4 pages. Please follow these guidelines: 4 Vacuum pages are equivalent to 2600 words. 6 Vacuum pages are equivalent to 3900 words. One table or figure is equivalent to 150 words. For example, a contributed paper containing 5 figures: 1850 words + 5 figures = 2600 = 4 printed pages in Vacuum. The paper (original plus two copies) with a 3,5” floppy disk should be provided to the Conference Office during the registration.


Manuscript Preparation

General: All manuscripts should be typewritten in good English. The paper copies of the text should be prepared with double line spacing and wide margins, on numbered sheets. Good quality printouts with a font size of 12 or 10 pt are required. The corresponding author should be identified (include a Fax number and E-mail address). Full postal addresses must be given for all co-authors. Authors should consult a recent issue of the journal for style if possible. An electronic copy of the paper should accompany the final version. The Editors reserve the right to adjust style to certain standards of uniformity. Authors should retain a copy of their manuscript since we cannot accept responsibility for damage or loss of papers. Original manuscripts are discarded one month after publication unless the Publisher is asked to return original material after use.
Authors in Japan please note that information about how to have the English of your paper checked, corrected and improved (before submission) please contact our Tokyo office who will provide you with a list of language polishing services, Elsevier Japan K.K., 1-9-15 Higashi Azabu, Minato-ku, Tokyo 106-0044, Japan; tel.: +81-3-5561-5032; fax: +81-3-5561-5045; e-mail:

Abstracts: Papers should include an abstract, not exceeding 200 words, in which the main points of the paper are summarized.
Keywords: Authors are requested to supply a maximum of eight keywords accurately describing the contents of the manuscript.
Text: Follow this order when typing manuscripts: Title, Authors, Affiliations, Abstract, Keywords, Main text, Acknowledgements, Appendix, References, Vitae, Figure Captions and then Tables. Do not import the Figures or Tables into your text. The corresponding author should be identified with an asterisk and footnote. All other footnotes (except for table footnotes) should be identified with superscript Arabic numbers.
Units: All abbreviations should conform to the style of SI units but in addition to the Pascal, pressure may also be given in bar (bar) or millibar (mbar).
Symbols: Letters to be set in Greek type should be clearly indicated. This may be done by writing, for instance, the words 'Greek rho' in the margin the first time a rho is used. Equations and formulae should be clearly and carefully written, taking care to have all the figures and symbols, especially in fractions and equations, in the alignment in which they are to be printed.
Maths: Confusion between the letter I and the numeral 1 when standing alone can be avoided by looping the letter when typewritten. Similar differentiation between the letter O and zero 0 is advisable. Subscripts and superscripts should be clearly indicated. Primes (as p' ) should be written or identified so that they will not be interpreted as a superior figure 1 (p1). Exponential expressions which are at all complicated (e.g. exponentials with subscripts to superscript letters) should be given in the form 'exp ()', except where it would be less clear mathematically. It would be helpful to have a third set of any structural formulae attached. The solidus can often be used in mathematical expressions and in expressions involving multiple units.
References: All publications cited in the text should be presented in a list of references following the text of the manuscript. In the text refer to references by a number in square brackets on the line (e.g. Since Ristoiu [1]), and the full reference should be given in a numerical list at the end of the paper.
References should be given in the following form:

1. Ristoiu D, Cosma C, Voros A, Ristoiu T. Vacuum 1998;50:359-362.

2. Gerblinger J, Meixner H. J Appl Phys 1993;67:

3. Sze SM.The physics of semiconductor devices. New York: Wiley,1981. p. 245.

Illustrations: All illustrations should be provided in camera-ready form, suitable for reproduction (which may include reduction) without retouching. Photographs, charts and diagrams are all to be referred to as "Figure(s)" and should be numbered consecutively in the order to which they are referred. They should accompany the manuscript, but should not be included within the text. All illustrations should be clearly marked on the back with the figure number and the author's name. All figures are to have a caption. Captions should be supplied on a separate sheet.
Line drawings: Good quality printouts on white paper produced in black ink are required. All lettering, graph lines and points on graphs should be sufficiently large and bold to permit reproduction when the diagram has been reduced to a size suitable for inclusion in the journal. Dye-line prints or photocopies are not suitable for reproduction. Do not use any type of shading on computer-generated illustrations.
Photographs: Original photographs must be supplied as they are to be reproduced (e.g. black and white or colour). If necessary, a scale should be marked on the photograph. Please note that photocopies of photographs are not acceptable.
Colour: The normal policy for colour halftones is that these are charged, but exceptions will be made at the discretion of the Editor if these halftones are judged essential. In case of charging, the author will be asked to bear part of the extra costs involved. Further information is available from the Author Services Department (for contact details see below).
If, together with your accepted article, you submit usable colour figures then Elsevier will ensure, at no additional charge, that these figures will appear in colour on the web (e.g., ScienceDirect and other sites) regardless of whether or not these illustrations are reproduced in colour in the printed version. For colour reproduction in print, you will receive information regarding the costs from Elsevier after receipt of your accepted article. For further information on the preparation of electronic artwork, please see

Please note: Because of technical complications which can arise by converting colour figures to prime.gifgrey scaleprime.gof (for the printed version should you not opt for colour in print) please submit in addition usable black and white prints corresponding to all the colour illustrations.

Tables: Tables should be numbered consecutively and given a suitable caption and each table typed on a separate sheet. Footnotes to tables should be typed below the table and should be referred to by superscript lowercase letters. No vertical rules should be used. Tables should not duplicate results presented elsewhere in the manuscript, (e.g. in graphs).

Electronic Manuscripts
The publisher requires an electronic version of your accepted manuscript. If there is not already a copy of this (on disk) with the journal editor at the time the manuscript is being refereed, you will be asked to send a file with the text of the revised manuscript. All major text processing packages can be handled, but text in either Word or WordPerfect is preferred. As to formats, both MS-DOS and Macintosh formatted disks can be handled. Please note that no deviations from the version accepted by the editor of the journal are permissible without the prior and explicit approval by the editor. Such changes should be clearly indicated on an accompanying printout of the file. In case discrepancies between hardcopy and electronic text are found by the publisher, the hardcopy version of the manuscript will be used (scanned) in all cases. For full details of electronic submission and other formats can be obtained from or contact the Author Support Department at Elsevier Science. Also authors wishing to make use of LaTex and would like to obtain style files are requested to contact this Department

Proofs will be sent to the author (first named author if no corresponding author is identified of multi-authored papers) and should be returned within 48 hours of receipt. Corrections should be restricted to typesetting errors; any others may be charged to the author. Any queries should be answered in full. Please note that authors are urged to check their proofs carefully before return, since the inclusion of late corrections cannot be guaranteed.

Twenty-five offprints will be supplied free of charge. Additional offprints and copies of the issue can be ordered at a specially reduced rate using the order form sent to the corresponding author after the manuscript has been accepted. Orders for reprints (produced after publication of an article) will incur a 50% surcharge.

All authors must sign the "Transfer of Copyright" agreement before the article can be published. This transfer agreement enables Elsevier Ltd to protect the copyrighted material for the authors, without the author relinquishing his/her proprietary rights. The copyright transfer covers the exclusive rights to reproduce and distribute the article, including reprints, photographic reproductions, microfilm or any other reproductions of a similar nature, and translations. It also includes the right to adapt the article for use in conjunction with computer systems and programs, including reproduction or publication in machine-readable form and incorporation in retrieval systems. Authors are responsible for obtaining from the copyright holder permission to reproduce any material for which copyright already exists.

Author Benefits
No page charges. Publishing in Vacuum is free.
Free offprints. The corresponding author will receive 25 offprints free of charge. An offprint order form will be supplied by the publisher for ordering any additional paid offprints.
Discount. Contributors to Elsevier journals are entitled to a 30% discount on all Elsevier Science books.

Authors Enquiries
Authors can keep track on the progress of their accepted article, and set up e-mail alerts informing the use of changes to their manuscript's status, by using the "Track a Paper" feature of Elsevier's Author Gateway.

Contact details for questions arising after acceptance of an article, especially those relating to proofs, are provided when an article is accepted for publication.

Additional author support is available from the Author Support Department